7/12/2012	7:40:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	7:40:52 AM	Recipe started at 7:40 AM
7/12/2012	7:40:52 AM	Helium valve closed
7/12/2012	7:40:52 AM	H2 valve closed
7/12/2012	7:40:52 AM	BCl3 valve closed
7/12/2012	7:40:52 AM	PH3 valve closed
7/12/2012	7:40:52 AM	SiCl4 pre valve closed
7/12/2012	7:40:52 AM	SiCl4 post valve closed
7/12/2012	7:40:52 AM	Main Vac valve closed
7/12/2012	7:40:52 AM	Bypass valve closed
7/12/2012	7:40:52 AM	Bubbler valve closed
7/12/2012	7:40:52 AM	Helium MFC set to  0.000000
7/12/2012	7:40:52 AM	H2 MFC set to  0.000000
7/12/2012	7:40:52 AM	BCl3 MFC set to  0.000000
7/12/2012	7:40:52 AM	PH3 MFC set to  0.000000
7/12/2012	7:40:52 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:40:52 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:40:53 AM	Tube furnace set to 0
7/12/2012	7:40:56 AM	H2 valve closed
7/12/2012	7:40:56 AM	BCl3 valve closed
7/12/2012	7:40:56 AM	PH3 valve closed
7/12/2012	7:40:56 AM	SiCl4 pre valve closed
7/12/2012	7:40:56 AM	SiCl4 post valve closed
7/12/2012	7:40:56 AM	Main Vac valve closed
7/12/2012	7:40:56 AM	Bypass valve closed
7/12/2012	7:40:56 AM	Bubbler valve closed
7/12/2012	7:40:56 AM	Helium valve opened
7/12/2012	7:40:56 AM	Helium MFC set to  500.000000
7/12/2012	7:40:56 AM	H2 MFC set to  0.000000
7/12/2012	7:40:56 AM	BCl3 MFC set to  0.000000
7/12/2012	7:40:56 AM	PH3 MFC set to  0.000000
7/12/2012	7:40:56 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:40:56 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:40:56 AM	Tube furnace set to 0
7/12/2012	7:42:08 AM	Helium valve closed
7/12/2012	7:42:08 AM	H2 valve closed
7/12/2012	7:42:08 AM	BCl3 valve closed
7/12/2012	7:42:08 AM	PH3 valve closed
7/12/2012	7:42:08 AM	SiCl4 pre valve closed
7/12/2012	7:42:08 AM	SiCl4 post valve closed
7/12/2012	7:42:08 AM	Main Vac valve closed
7/12/2012	7:42:08 AM	Bypass valve closed
7/12/2012	7:42:08 AM	Bubbler valve closed
7/12/2012	7:42:08 AM	Helium MFC set to  0.000000
7/12/2012	7:42:08 AM	H2 MFC set to  0.000000
7/12/2012	7:42:08 AM	BCl3 MFC set to  0.000000
7/12/2012	7:42:08 AM	PH3 MFC set to  0.000000
7/12/2012	7:42:08 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:42:08 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:42:08 AM	Tube furnace set to 0
7/12/2012	7:42:09 AM	Run finished at 7:42 AM
7/12/2012	7:42:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	7:45:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	7:45:27 AM	Recipe started at 7:45 AM
7/12/2012	7:45:27 AM	Helium valve closed
7/12/2012	7:45:27 AM	H2 valve closed
7/12/2012	7:45:27 AM	BCl3 valve closed
7/12/2012	7:45:27 AM	PH3 valve closed
7/12/2012	7:45:27 AM	SiCl4 pre valve closed
7/12/2012	7:45:27 AM	SiCl4 post valve closed
7/12/2012	7:45:27 AM	Main Vac valve closed
7/12/2012	7:45:27 AM	Bubbler valve closed
7/12/2012	7:45:27 AM	Bypass valve opened
7/12/2012	7:45:27 AM	Helium MFC set to  0.000000
7/12/2012	7:45:27 AM	H2 MFC set to  0.000000
7/12/2012	7:45:27 AM	BCl3 MFC set to  0.000000
7/12/2012	7:45:27 AM	PH3 MFC set to  0.000000
7/12/2012	7:45:27 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:45:27 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:45:27 AM	Tube furnace set to 0
7/12/2012	7:46:35 AM	Helium valve closed
7/12/2012	7:46:35 AM	H2 valve closed
7/12/2012	7:46:35 AM	BCl3 valve closed
7/12/2012	7:46:35 AM	PH3 valve closed
7/12/2012	7:46:35 AM	SiCl4 pre valve closed
7/12/2012	7:46:35 AM	SiCl4 post valve closed
7/12/2012	7:46:35 AM	Main Vac valve closed
7/12/2012	7:46:35 AM	Bubbler valve closed
7/12/2012	7:46:35 AM	Bypass valve opened
7/12/2012	7:46:35 AM	Helium MFC set to  0.000000
7/12/2012	7:46:35 AM	H2 MFC set to  0.000000
7/12/2012	7:46:35 AM	BCl3 MFC set to  0.000000
7/12/2012	7:46:35 AM	PH3 MFC set to  0.000000
7/12/2012	7:46:35 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:46:35 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:46:35 AM	Tube furnace set to 0
7/12/2012	7:47:35 AM	Helium valve closed
7/12/2012	7:47:35 AM	H2 valve closed
7/12/2012	7:47:35 AM	BCl3 valve closed
7/12/2012	7:47:35 AM	PH3 valve closed
7/12/2012	7:47:35 AM	SiCl4 pre valve closed
7/12/2012	7:47:35 AM	SiCl4 post valve closed
7/12/2012	7:47:35 AM	Bypass valve closed
7/12/2012	7:47:35 AM	Bubbler valve closed
7/12/2012	7:47:35 AM	Main Vac valve opened
7/12/2012	7:47:35 AM	Helium MFC set to  0.000000
7/12/2012	7:47:35 AM	H2 MFC set to  0.000000
7/12/2012	7:47:35 AM	BCl3 MFC set to  0.000000
7/12/2012	7:47:35 AM	PH3 MFC set to  0.000000
7/12/2012	7:47:35 AM	SiCl4 MFC set to  0.000000
7/12/2012	7:47:35 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:47:35 AM	Tube furnace set to 0
7/12/2012	7:47:36 AM	Run finished at 7:47 AM
7/12/2012	7:47:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	9:11:12 AM	Main Vac valve closed
7/12/2012	9:11:25 AM	Main Vac valve opened
7/12/2012	9:12:17 AM	Recipe started at 9:12 AM
7/12/2012	9:12:17 AM	Helium valve closed
7/12/2012	9:12:17 AM	H2 valve closed
7/12/2012	9:12:17 AM	BCl3 valve closed
7/12/2012	9:12:17 AM	PH3 valve closed
7/12/2012	9:12:17 AM	SiCl4 pre valve closed
7/12/2012	9:12:17 AM	SiCl4 post valve closed
7/12/2012	9:12:17 AM	Bypass valve closed
7/12/2012	9:12:17 AM	Bubbler valve closed
7/12/2012	9:12:17 AM	Main Vac valve opened
7/12/2012	9:12:17 AM	Helium MFC set to  0.000000
7/12/2012	9:12:17 AM	H2 MFC set to  0.000000
7/12/2012	9:12:17 AM	BCl3 MFC set to  0.000000
7/12/2012	9:12:17 AM	PH3 MFC set to  0.000000
7/12/2012	9:12:17 AM	SiCl4 MFC set to  0.000000
7/12/2012	9:12:17 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:12:17 AM	Tube furnace set to 0
7/12/2012	9:16:17 AM	Helium valve closed
7/12/2012	9:16:17 AM	H2 valve closed
7/12/2012	9:16:17 AM	BCl3 valve closed
7/12/2012	9:16:17 AM	PH3 valve closed
7/12/2012	9:16:17 AM	SiCl4 pre valve closed
7/12/2012	9:16:17 AM	SiCl4 post valve closed
7/12/2012	9:16:17 AM	Main Vac valve closed
7/12/2012	9:16:17 AM	Bypass valve closed
7/12/2012	9:16:17 AM	Bubbler valve closed
7/12/2012	9:16:17 AM	Helium MFC set to  0.000000
7/12/2012	9:16:17 AM	H2 MFC set to  0.000000
7/12/2012	9:16:17 AM	BCl3 MFC set to  0.000000
7/12/2012	9:16:17 AM	PH3 MFC set to  0.000000
7/12/2012	9:16:17 AM	SiCl4 MFC set to  0.000000
7/12/2012	9:16:17 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:16:17 AM	Tube furnace set to 0
7/12/2012	9:16:20 AM	Helium valve closed
7/12/2012	9:16:20 AM	BCl3 valve closed
7/12/2012	9:16:20 AM	PH3 valve closed
7/12/2012	9:16:20 AM	SiCl4 pre valve closed
7/12/2012	9:16:20 AM	SiCl4 post valve closed
7/12/2012	9:16:20 AM	Main Vac valve closed
7/12/2012	9:16:20 AM	Bypass valve closed
7/12/2012	9:16:20 AM	Bubbler valve closed
7/12/2012	9:16:20 AM	H2 valve opened
7/12/2012	9:16:20 AM	Helium MFC set to  0.000000
7/12/2012	9:16:20 AM	H2 MFC set to  500.000000
7/12/2012	9:16:20 AM	BCl3 MFC set to  0.000000
7/12/2012	9:16:20 AM	PH3 MFC set to  0.000000
7/12/2012	9:16:20 AM	SiCl4 MFC set to  0.000000
7/12/2012	9:16:20 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:16:20 AM	Tube furnace set to 0
7/12/2012	9:17:36 AM	Helium valve closed
7/12/2012	9:17:36 AM	BCl3 valve closed
7/12/2012	9:17:36 AM	PH3 valve closed
7/12/2012	9:17:36 AM	SiCl4 pre valve closed
7/12/2012	9:17:36 AM	SiCl4 post valve closed
7/12/2012	9:17:36 AM	Main Vac valve closed
7/12/2012	9:17:36 AM	Bypass valve closed
7/12/2012	9:17:36 AM	H2 valve opened
7/12/2012	9:17:36 AM	Bubbler valve opened
7/12/2012	9:17:36 AM	Helium MFC set to  0.000000
7/12/2012	9:17:36 AM	H2 MFC set to  500.000000
7/12/2012	9:17:36 AM	BCl3 MFC set to  0.000000
7/12/2012	9:17:36 AM	PH3 MFC set to  0.000000
7/12/2012	9:17:36 AM	SiCl4 MFC set to  0.000000
7/12/2012	9:17:36 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:17:36 AM	Tube furnace set to 0
7/12/2012	9:17:37 AM	Helium valve closed
7/12/2012	9:17:37 AM	BCl3 valve closed
7/12/2012	9:17:37 AM	PH3 valve closed
7/12/2012	9:17:37 AM	SiCl4 pre valve closed
7/12/2012	9:17:37 AM	SiCl4 post valve closed
7/12/2012	9:17:37 AM	Main Vac valve closed
7/12/2012	9:17:38 AM	Bypass valve closed
7/12/2012	9:17:38 AM	H2 valve opened
7/12/2012	9:17:38 AM	Bubbler valve opened
7/12/2012	9:17:38 AM	Helium MFC set to  0.000000
7/12/2012	9:17:38 AM	H2 MFC set to  500.000000
7/12/2012	9:17:38 AM	BCl3 MFC set to  0.000000
7/12/2012	9:17:38 AM	PH3 MFC set to  0.000000
7/12/2012	9:17:38 AM	SiCl4 MFC set to  0.000000
7/12/2012	9:17:38 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:17:38 AM	Tube furnace set to 1000
7/12/2012	9:42:38 AM	Helium valve closed
7/12/2012	9:42:38 AM	PH3 valve closed
7/12/2012	9:42:38 AM	Main Vac valve closed
7/12/2012	9:42:38 AM	Bypass valve closed
7/12/2012	9:42:38 AM	H2 valve opened
7/12/2012	9:42:38 AM	BCl3 valve opened
7/12/2012	9:42:38 AM	SiCl4 pre valve opened
7/12/2012	9:42:38 AM	SiCl4 post valve opened
7/12/2012	9:42:38 AM	Bubbler valve opened
7/12/2012	9:42:38 AM	Helium MFC set to  0.000000
7/12/2012	9:42:38 AM	H2 MFC set to  450.000000
7/12/2012	9:42:38 AM	BCl3 MFC set to  1.000000
7/12/2012	9:42:38 AM	PH3 MFC set to  0.000000
7/12/2012	9:42:38 AM	SiCl4 MFC set to  50.000000
7/12/2012	9:42:38 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:42:38 AM	Tube furnace set to 1000
7/12/2012	10:16:38 AM	Helium valve closed
7/12/2012	10:16:38 AM	BCl3 valve closed
7/12/2012	10:16:38 AM	PH3 valve closed
7/12/2012	10:16:38 AM	SiCl4 pre valve closed
7/12/2012	10:16:38 AM	SiCl4 post valve closed
7/12/2012	10:16:38 AM	Main Vac valve closed
7/12/2012	10:16:38 AM	Bypass valve closed
7/12/2012	10:16:38 AM	H2 valve opened
7/12/2012	10:16:38 AM	Bubbler valve opened
7/12/2012	10:16:38 AM	Helium MFC set to  0.000000
7/12/2012	10:16:38 AM	H2 MFC set to  500.000000
7/12/2012	10:16:38 AM	BCl3 MFC set to  0.000000
7/12/2012	10:16:38 AM	PH3 MFC set to  0.000000
7/12/2012	10:16:38 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:16:38 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:16:38 AM	Tube furnace set to 750
7/12/2012	10:31:38 AM	H2 valve closed
7/12/2012	10:31:38 AM	BCl3 valve closed
7/12/2012	10:31:38 AM	PH3 valve closed
7/12/2012	10:31:38 AM	SiCl4 pre valve closed
7/12/2012	10:31:38 AM	SiCl4 post valve closed
7/12/2012	10:31:38 AM	Main Vac valve closed
7/12/2012	10:31:38 AM	Bypass valve closed
7/12/2012	10:31:38 AM	Helium valve opened
7/12/2012	10:31:38 AM	Bubbler valve opened
7/12/2012	10:31:38 AM	Helium MFC set to  500.000000
7/12/2012	10:31:38 AM	H2 MFC set to  0.000000
7/12/2012	10:31:38 AM	BCl3 MFC set to  0.000000
7/12/2012	10:31:38 AM	PH3 MFC set to  0.000000
7/12/2012	10:31:38 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:31:38 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:31:38 AM	Tube furnace set to 0
7/12/2012	10:51:38 AM	Helium valve closed
7/12/2012	10:51:38 AM	H2 valve closed
7/12/2012	10:51:38 AM	BCl3 valve closed
7/12/2012	10:51:38 AM	PH3 valve closed
7/12/2012	10:51:38 AM	SiCl4 pre valve closed
7/12/2012	10:51:38 AM	SiCl4 post valve closed
7/12/2012	10:51:38 AM	Main Vac valve closed
7/12/2012	10:51:38 AM	Bypass valve closed
7/12/2012	10:51:38 AM	Bubbler valve closed
7/12/2012	10:51:38 AM	Helium MFC set to  0.000000
7/12/2012	10:51:38 AM	H2 MFC set to  0.000000
7/12/2012	10:51:38 AM	BCl3 MFC set to  0.000000
7/12/2012	10:51:38 AM	PH3 MFC set to  0.000000
7/12/2012	10:51:38 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:51:38 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:51:38 AM	Tube furnace set to 0
7/12/2012	10:53:15 AM	Helium valve closed
7/12/2012	10:53:15 AM	H2 valve closed
7/12/2012	10:53:15 AM	BCl3 valve closed
7/12/2012	10:53:15 AM	PH3 valve closed
7/12/2012	10:53:15 AM	SiCl4 pre valve closed
7/12/2012	10:53:15 AM	SiCl4 post valve closed
7/12/2012	10:53:15 AM	Main Vac valve closed
7/12/2012	10:53:15 AM	Bubbler valve closed
7/12/2012	10:53:15 AM	Bypass valve opened
7/12/2012	10:53:15 AM	Helium MFC set to  0.000000
7/12/2012	10:53:15 AM	H2 MFC set to  0.000000
7/12/2012	10:53:15 AM	BCl3 MFC set to  0.000000
7/12/2012	10:53:15 AM	PH3 MFC set to  0.000000
7/12/2012	10:53:15 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:53:15 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:53:15 AM	Tube furnace set to 0
7/12/2012	10:54:10 AM	Helium valve closed
7/12/2012	10:54:10 AM	H2 valve closed
7/12/2012	10:54:10 AM	BCl3 valve closed
7/12/2012	10:54:10 AM	PH3 valve closed
7/12/2012	10:54:10 AM	SiCl4 pre valve closed
7/12/2012	10:54:10 AM	SiCl4 post valve closed
7/12/2012	10:54:10 AM	Main Vac valve closed
7/12/2012	10:54:10 AM	Bubbler valve closed
7/12/2012	10:54:10 AM	Bypass valve opened
7/12/2012	10:54:10 AM	Helium MFC set to  0.000000
7/12/2012	10:54:10 AM	H2 MFC set to  0.000000
7/12/2012	10:54:10 AM	BCl3 MFC set to  0.000000
7/12/2012	10:54:10 AM	PH3 MFC set to  0.000000
7/12/2012	10:54:10 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:54:10 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:54:10 AM	Tube furnace set to 0
7/12/2012	10:55:10 AM	Helium valve closed
7/12/2012	10:55:10 AM	H2 valve closed
7/12/2012	10:55:10 AM	BCl3 valve closed
7/12/2012	10:55:10 AM	PH3 valve closed
7/12/2012	10:55:10 AM	SiCl4 pre valve closed
7/12/2012	10:55:10 AM	SiCl4 post valve closed
7/12/2012	10:55:10 AM	Bypass valve closed
7/12/2012	10:55:10 AM	Bubbler valve closed
7/12/2012	10:55:10 AM	Main Vac valve opened
7/12/2012	10:55:10 AM	Helium MFC set to  0.000000
7/12/2012	10:55:10 AM	H2 MFC set to  0.000000
7/12/2012	10:55:10 AM	BCl3 MFC set to  0.000000
7/12/2012	10:55:10 AM	PH3 MFC set to  0.000000
7/12/2012	10:55:10 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:55:10 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:55:11 AM	Tube furnace set to 0
7/12/2012	10:55:51 AM	Run finished at 10:55 AM
7/12/2012	10:56:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	10:56:06 AM	Recipe started at 10:56 AM
7/12/2012	10:56:06 AM	Helium valve closed
7/12/2012	10:56:06 AM	H2 valve closed
7/12/2012	10:56:06 AM	BCl3 valve closed
7/12/2012	10:56:06 AM	PH3 valve closed
7/12/2012	10:56:06 AM	SiCl4 pre valve closed
7/12/2012	10:56:06 AM	SiCl4 post valve closed
7/12/2012	10:56:06 AM	Main Vac valve closed
7/12/2012	10:56:06 AM	Bypass valve closed
7/12/2012	10:56:06 AM	Bubbler valve closed
7/12/2012	10:56:06 AM	Helium MFC set to  0.000000
7/12/2012	10:56:06 AM	H2 MFC set to  0.000000
7/12/2012	10:56:06 AM	BCl3 MFC set to  0.000000
7/12/2012	10:56:06 AM	PH3 MFC set to  0.000000
7/12/2012	10:56:06 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:56:06 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:56:06 AM	Tube furnace set to 0
7/12/2012	10:56:09 AM	H2 valve closed
7/12/2012	10:56:09 AM	BCl3 valve closed
7/12/2012	10:56:09 AM	PH3 valve closed
7/12/2012	10:56:09 AM	SiCl4 pre valve closed
7/12/2012	10:56:09 AM	SiCl4 post valve closed
7/12/2012	10:56:09 AM	Main Vac valve closed
7/12/2012	10:56:09 AM	Bypass valve closed
7/12/2012	10:56:09 AM	Bubbler valve closed
7/12/2012	10:56:09 AM	Helium valve opened
7/12/2012	10:56:09 AM	Helium MFC set to  500.000000
7/12/2012	10:56:09 AM	H2 MFC set to  0.000000
7/12/2012	10:56:09 AM	BCl3 MFC set to  0.000000
7/12/2012	10:56:09 AM	PH3 MFC set to  0.000000
7/12/2012	10:56:09 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:56:09 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:56:09 AM	Tube furnace set to 0
7/12/2012	10:57:19 AM	Helium valve closed
7/12/2012	10:57:19 AM	H2 valve closed
7/12/2012	10:57:19 AM	BCl3 valve closed
7/12/2012	10:57:19 AM	PH3 valve closed
7/12/2012	10:57:19 AM	SiCl4 pre valve closed
7/12/2012	10:57:19 AM	SiCl4 post valve closed
7/12/2012	10:57:19 AM	Main Vac valve closed
7/12/2012	10:57:19 AM	Bypass valve closed
7/12/2012	10:57:19 AM	Bubbler valve closed
7/12/2012	10:57:19 AM	Helium MFC set to  0.000000
7/12/2012	10:57:19 AM	H2 MFC set to  0.000000
7/12/2012	10:57:19 AM	BCl3 MFC set to  0.000000
7/12/2012	10:57:19 AM	PH3 MFC set to  0.000000
7/12/2012	10:57:19 AM	SiCl4 MFC set to  0.000000
7/12/2012	10:57:19 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	10:57:19 AM	Tube furnace set to 0
7/12/2012	10:57:20 AM	Run finished at 10:57 AM
7/12/2012	10:57:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	11:01:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	11:01:42 AM	Recipe started at 11:01 AM
7/12/2012	11:01:42 AM	Helium valve closed
7/12/2012	11:01:42 AM	H2 valve closed
7/12/2012	11:01:42 AM	BCl3 valve closed
7/12/2012	11:01:42 AM	PH3 valve closed
7/12/2012	11:01:42 AM	SiCl4 pre valve closed
7/12/2012	11:01:42 AM	SiCl4 post valve closed
7/12/2012	11:01:42 AM	Main Vac valve closed
7/12/2012	11:01:42 AM	Bubbler valve closed
7/12/2012	11:01:42 AM	Bypass valve opened
7/12/2012	11:01:42 AM	Helium MFC set to  0.000000
7/12/2012	11:01:42 AM	H2 MFC set to  0.000000
7/12/2012	11:01:42 AM	BCl3 MFC set to  0.000000
7/12/2012	11:01:42 AM	PH3 MFC set to  0.000000
7/12/2012	11:01:42 AM	SiCl4 MFC set to  0.000000
7/12/2012	11:01:42 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:01:42 AM	Tube furnace set to 0
7/12/2012	11:02:52 AM	Helium valve closed
7/12/2012	11:02:52 AM	H2 valve closed
7/12/2012	11:02:52 AM	BCl3 valve closed
7/12/2012	11:02:52 AM	PH3 valve closed
7/12/2012	11:02:52 AM	SiCl4 pre valve closed
7/12/2012	11:02:52 AM	SiCl4 post valve closed
7/12/2012	11:02:52 AM	Main Vac valve closed
7/12/2012	11:02:52 AM	Bubbler valve closed
7/12/2012	11:02:52 AM	Bypass valve opened
7/12/2012	11:02:52 AM	Helium MFC set to  0.000000
7/12/2012	11:02:52 AM	H2 MFC set to  0.000000
7/12/2012	11:02:52 AM	BCl3 MFC set to  0.000000
7/12/2012	11:02:52 AM	PH3 MFC set to  0.000000
7/12/2012	11:02:52 AM	SiCl4 MFC set to  0.000000
7/12/2012	11:02:52 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:02:52 AM	Tube furnace set to 0
7/12/2012	11:03:52 AM	Helium valve closed
7/12/2012	11:03:52 AM	H2 valve closed
7/12/2012	11:03:52 AM	BCl3 valve closed
7/12/2012	11:03:52 AM	PH3 valve closed
7/12/2012	11:03:52 AM	SiCl4 pre valve closed
7/12/2012	11:03:52 AM	SiCl4 post valve closed
7/12/2012	11:03:52 AM	Bypass valve closed
7/12/2012	11:03:52 AM	Bubbler valve closed
7/12/2012	11:03:52 AM	Main Vac valve opened
7/12/2012	11:03:52 AM	Helium MFC set to  0.000000
7/12/2012	11:03:52 AM	H2 MFC set to  0.000000
7/12/2012	11:03:52 AM	BCl3 MFC set to  0.000000
7/12/2012	11:03:52 AM	PH3 MFC set to  0.000000
7/12/2012	11:03:52 AM	SiCl4 MFC set to  0.000000
7/12/2012	11:03:52 AM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:03:52 AM	Tube furnace set to 0
7/12/2012	11:03:53 AM	Run finished at 11:03 AM
7/12/2012	11:03:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	12:36:17 PM	Recipe started at 12:36 PM
7/12/2012	12:36:17 PM	Helium valve closed
7/12/2012	12:36:17 PM	H2 valve closed
7/12/2012	12:36:17 PM	BCl3 valve closed
7/12/2012	12:36:17 PM	PH3 valve closed
7/12/2012	12:36:17 PM	SiCl4 pre valve closed
7/12/2012	12:36:17 PM	SiCl4 post valve closed
7/12/2012	12:36:17 PM	Bypass valve closed
7/12/2012	12:36:17 PM	Bubbler valve closed
7/12/2012	12:36:17 PM	Main Vac valve opened
7/12/2012	12:36:17 PM	Helium MFC set to  0.000000
7/12/2012	12:36:17 PM	H2 MFC set to  0.000000
7/12/2012	12:36:17 PM	BCl3 MFC set to  0.000000
7/12/2012	12:36:17 PM	PH3 MFC set to  0.000000
7/12/2012	12:36:17 PM	SiCl4 MFC set to  0.000000
7/12/2012	12:36:17 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	12:36:17 PM	Tube furnace set to 0
7/12/2012	12:36:20 PM	Helium valve closed
7/12/2012	12:36:20 PM	H2 valve closed
7/12/2012	12:36:20 PM	BCl3 valve closed
7/12/2012	12:36:20 PM	PH3 valve closed
7/12/2012	12:36:20 PM	SiCl4 pre valve closed
7/12/2012	12:36:20 PM	SiCl4 post valve closed
7/12/2012	12:36:20 PM	Main Vac valve closed
7/12/2012	12:36:20 PM	Bypass valve closed
7/12/2012	12:36:20 PM	Bubbler valve closed
7/12/2012	12:36:20 PM	Helium MFC set to  0.000000
7/12/2012	12:36:20 PM	H2 MFC set to  0.000000
7/12/2012	12:36:20 PM	BCl3 MFC set to  0.000000
7/12/2012	12:36:20 PM	PH3 MFC set to  0.000000
7/12/2012	12:36:20 PM	SiCl4 MFC set to  0.000000
7/12/2012	12:36:20 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	12:36:20 PM	Tube furnace set to 0
7/12/2012	12:36:23 PM	Helium valve closed
7/12/2012	12:36:23 PM	BCl3 valve closed
7/12/2012	12:36:23 PM	PH3 valve closed
7/12/2012	12:36:23 PM	SiCl4 pre valve closed
7/12/2012	12:36:23 PM	SiCl4 post valve closed
7/12/2012	12:36:23 PM	Main Vac valve closed
7/12/2012	12:36:23 PM	Bypass valve closed
7/12/2012	12:36:23 PM	Bubbler valve closed
7/12/2012	12:36:23 PM	H2 valve opened
7/12/2012	12:36:23 PM	Helium MFC set to  0.000000
7/12/2012	12:36:23 PM	H2 MFC set to  500.000000
7/12/2012	12:36:23 PM	BCl3 MFC set to  0.000000
7/12/2012	12:36:23 PM	PH3 MFC set to  0.000000
7/12/2012	12:36:23 PM	SiCl4 MFC set to  0.000000
7/12/2012	12:36:23 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	12:36:24 PM	Tube furnace set to 0
7/12/2012	12:37:36 PM	Helium valve closed
7/12/2012	12:37:36 PM	BCl3 valve closed
7/12/2012	12:37:36 PM	PH3 valve closed
7/12/2012	12:37:36 PM	SiCl4 pre valve closed
7/12/2012	12:37:36 PM	SiCl4 post valve closed
7/12/2012	12:37:36 PM	Main Vac valve closed
7/12/2012	12:37:36 PM	Bypass valve closed
7/12/2012	12:37:36 PM	H2 valve opened
7/12/2012	12:37:36 PM	Bubbler valve opened
7/12/2012	12:37:36 PM	Helium MFC set to  0.000000
7/12/2012	12:37:36 PM	H2 MFC set to  500.000000
7/12/2012	12:37:36 PM	BCl3 MFC set to  0.000000
7/12/2012	12:37:36 PM	PH3 MFC set to  0.000000
7/12/2012	12:37:36 PM	SiCl4 MFC set to  0.000000
7/12/2012	12:37:36 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	12:37:37 PM	Tube furnace set to 0
7/12/2012	12:37:38 PM	Helium valve closed
7/12/2012	12:37:38 PM	BCl3 valve closed
7/12/2012	12:37:38 PM	PH3 valve closed
7/12/2012	12:37:38 PM	SiCl4 pre valve closed
7/12/2012	12:37:38 PM	SiCl4 post valve closed
7/12/2012	12:37:38 PM	Main Vac valve closed
7/12/2012	12:37:38 PM	Bypass valve closed
7/12/2012	12:37:38 PM	H2 valve opened
7/12/2012	12:37:38 PM	Bubbler valve opened
7/12/2012	12:37:38 PM	Helium MFC set to  0.000000
7/12/2012	12:37:38 PM	H2 MFC set to  500.000000
7/12/2012	12:37:38 PM	BCl3 MFC set to  0.000000
7/12/2012	12:37:38 PM	PH3 MFC set to  0.000000
7/12/2012	12:37:38 PM	SiCl4 MFC set to  0.000000
7/12/2012	12:37:38 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	12:37:38 PM	Tube furnace set to 1000
7/12/2012	1:02:38 PM	Helium valve closed
7/12/2012	1:02:38 PM	PH3 valve closed
7/12/2012	1:02:38 PM	Main Vac valve closed
7/12/2012	1:02:38 PM	Bypass valve closed
7/12/2012	1:02:38 PM	H2 valve opened
7/12/2012	1:02:38 PM	BCl3 valve opened
7/12/2012	1:02:38 PM	SiCl4 pre valve opened
7/12/2012	1:02:38 PM	SiCl4 post valve opened
7/12/2012	1:02:38 PM	Bubbler valve opened
7/12/2012	1:02:38 PM	Helium MFC set to  0.000000
7/12/2012	1:02:38 PM	H2 MFC set to  450.000000
7/12/2012	1:02:38 PM	BCl3 MFC set to  1.000000
7/12/2012	1:02:38 PM	PH3 MFC set to  0.000000
7/12/2012	1:02:38 PM	SiCl4 MFC set to  50.000000
7/12/2012	1:02:38 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	1:02:38 PM	Tube furnace set to 1000
7/12/2012	1:36:38 PM	Helium valve closed
7/12/2012	1:36:38 PM	BCl3 valve closed
7/12/2012	1:36:38 PM	PH3 valve closed
7/12/2012	1:36:38 PM	SiCl4 pre valve closed
7/12/2012	1:36:38 PM	SiCl4 post valve closed
7/12/2012	1:36:38 PM	Main Vac valve closed
7/12/2012	1:36:38 PM	Bypass valve closed
7/12/2012	1:36:38 PM	H2 valve opened
7/12/2012	1:36:38 PM	Bubbler valve opened
7/12/2012	1:36:38 PM	Helium MFC set to  0.000000
7/12/2012	1:36:38 PM	H2 MFC set to  500.000000
7/12/2012	1:36:38 PM	BCl3 MFC set to  0.000000
7/12/2012	1:36:38 PM	PH3 MFC set to  0.000000
7/12/2012	1:36:38 PM	SiCl4 MFC set to  0.000000
7/12/2012	1:36:38 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	1:36:38 PM	Tube furnace set to 750
7/12/2012	1:51:38 PM	H2 valve closed
7/12/2012	1:51:38 PM	BCl3 valve closed
7/12/2012	1:51:38 PM	PH3 valve closed
7/12/2012	1:51:38 PM	SiCl4 pre valve closed
7/12/2012	1:51:38 PM	SiCl4 post valve closed
7/12/2012	1:51:38 PM	Main Vac valve closed
7/12/2012	1:51:38 PM	Bypass valve closed
7/12/2012	1:51:38 PM	Helium valve opened
7/12/2012	1:51:38 PM	Bubbler valve opened
7/12/2012	1:51:38 PM	Helium MFC set to  500.000000
7/12/2012	1:51:38 PM	H2 MFC set to  0.000000
7/12/2012	1:51:38 PM	BCl3 MFC set to  0.000000
7/12/2012	1:51:38 PM	PH3 MFC set to  0.000000
7/12/2012	1:51:38 PM	SiCl4 MFC set to  0.000000
7/12/2012	1:51:38 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	1:51:38 PM	Tube furnace set to 0
7/12/2012	2:11:38 PM	Helium valve closed
7/12/2012	2:11:38 PM	H2 valve closed
7/12/2012	2:11:38 PM	BCl3 valve closed
7/12/2012	2:11:38 PM	PH3 valve closed
7/12/2012	2:11:38 PM	SiCl4 pre valve closed
7/12/2012	2:11:38 PM	SiCl4 post valve closed
7/12/2012	2:11:38 PM	Main Vac valve closed
7/12/2012	2:11:38 PM	Bypass valve closed
7/12/2012	2:11:38 PM	Bubbler valve closed
7/12/2012	2:11:38 PM	Helium MFC set to  0.000000
7/12/2012	2:11:38 PM	H2 MFC set to  0.000000
7/12/2012	2:11:38 PM	BCl3 MFC set to  0.000000
7/12/2012	2:11:38 PM	PH3 MFC set to  0.000000
7/12/2012	2:11:38 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:11:38 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:11:39 PM	Tube furnace set to 0
7/12/2012	2:18:10 PM	Helium valve closed
7/12/2012	2:18:10 PM	H2 valve closed
7/12/2012	2:18:10 PM	BCl3 valve closed
7/12/2012	2:18:10 PM	PH3 valve closed
7/12/2012	2:18:10 PM	SiCl4 pre valve closed
7/12/2012	2:18:10 PM	SiCl4 post valve closed
7/12/2012	2:18:10 PM	Main Vac valve closed
7/12/2012	2:18:10 PM	Bubbler valve closed
7/12/2012	2:18:10 PM	Bypass valve opened
7/12/2012	2:18:10 PM	Helium MFC set to  0.000000
7/12/2012	2:18:10 PM	H2 MFC set to  0.000000
7/12/2012	2:18:10 PM	BCl3 MFC set to  0.000000
7/12/2012	2:18:10 PM	PH3 MFC set to  0.000000
7/12/2012	2:18:10 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:18:10 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:18:10 PM	Tube furnace set to 0
7/12/2012	2:19:05 PM	Helium valve closed
7/12/2012	2:19:05 PM	H2 valve closed
7/12/2012	2:19:05 PM	BCl3 valve closed
7/12/2012	2:19:05 PM	PH3 valve closed
7/12/2012	2:19:05 PM	SiCl4 pre valve closed
7/12/2012	2:19:05 PM	SiCl4 post valve closed
7/12/2012	2:19:05 PM	Main Vac valve closed
7/12/2012	2:19:05 PM	Bubbler valve closed
7/12/2012	2:19:05 PM	Bypass valve opened
7/12/2012	2:19:05 PM	Helium MFC set to  0.000000
7/12/2012	2:19:05 PM	H2 MFC set to  0.000000
7/12/2012	2:19:05 PM	BCl3 MFC set to  0.000000
7/12/2012	2:19:05 PM	PH3 MFC set to  0.000000
7/12/2012	2:19:05 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:19:05 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:19:05 PM	Tube furnace set to 0
7/12/2012	2:20:05 PM	Helium valve closed
7/12/2012	2:20:05 PM	H2 valve closed
7/12/2012	2:20:05 PM	BCl3 valve closed
7/12/2012	2:20:05 PM	PH3 valve closed
7/12/2012	2:20:05 PM	SiCl4 pre valve closed
7/12/2012	2:20:05 PM	SiCl4 post valve closed
7/12/2012	2:20:05 PM	Bypass valve closed
7/12/2012	2:20:05 PM	Bubbler valve closed
7/12/2012	2:20:05 PM	Main Vac valve opened
7/12/2012	2:20:05 PM	Helium MFC set to  0.000000
7/12/2012	2:20:05 PM	H2 MFC set to  0.000000
7/12/2012	2:20:05 PM	BCl3 MFC set to  0.000000
7/12/2012	2:20:05 PM	PH3 MFC set to  0.000000
7/12/2012	2:20:05 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:20:05 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:20:06 PM	Tube furnace set to 0
7/12/2012	2:20:40 PM	Run finished at 2:20 PM
7/12/2012	2:23:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	2:23:14 PM	Recipe started at 2:23 PM
7/12/2012	2:23:14 PM	Helium valve closed
7/12/2012	2:23:14 PM	H2 valve closed
7/12/2012	2:23:14 PM	BCl3 valve closed
7/12/2012	2:23:14 PM	PH3 valve closed
7/12/2012	2:23:14 PM	SiCl4 pre valve closed
7/12/2012	2:23:14 PM	SiCl4 post valve closed
7/12/2012	2:23:14 PM	Main Vac valve closed
7/12/2012	2:23:14 PM	Bypass valve closed
7/12/2012	2:23:14 PM	Bubbler valve closed
7/12/2012	2:23:14 PM	Helium MFC set to  0.000000
7/12/2012	2:23:14 PM	H2 MFC set to  0.000000
7/12/2012	2:23:14 PM	BCl3 MFC set to  0.000000
7/12/2012	2:23:14 PM	PH3 MFC set to  0.000000
7/12/2012	2:23:14 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:23:14 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:23:14 PM	Tube furnace set to 0
7/12/2012	2:23:17 PM	H2 valve closed
7/12/2012	2:23:17 PM	BCl3 valve closed
7/12/2012	2:23:17 PM	PH3 valve closed
7/12/2012	2:23:18 PM	SiCl4 pre valve closed
7/12/2012	2:23:18 PM	SiCl4 post valve closed
7/12/2012	2:23:18 PM	Main Vac valve closed
7/12/2012	2:23:18 PM	Bypass valve closed
7/12/2012	2:23:18 PM	Bubbler valve closed
7/12/2012	2:23:18 PM	Helium valve opened
7/12/2012	2:23:18 PM	Helium MFC set to  500.000000
7/12/2012	2:23:18 PM	H2 MFC set to  0.000000
7/12/2012	2:23:18 PM	BCl3 MFC set to  0.000000
7/12/2012	2:23:18 PM	PH3 MFC set to  0.000000
7/12/2012	2:23:18 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:23:18 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:23:18 PM	Tube furnace set to 0
7/12/2012	2:24:27 PM	Helium valve closed
7/12/2012	2:24:27 PM	H2 valve closed
7/12/2012	2:24:27 PM	BCl3 valve closed
7/12/2012	2:24:27 PM	PH3 valve closed
7/12/2012	2:24:27 PM	SiCl4 pre valve closed
7/12/2012	2:24:27 PM	SiCl4 post valve closed
7/12/2012	2:24:27 PM	Main Vac valve closed
7/12/2012	2:24:27 PM	Bypass valve closed
7/12/2012	2:24:27 PM	Bubbler valve closed
7/12/2012	2:24:27 PM	Helium MFC set to  0.000000
7/12/2012	2:24:27 PM	H2 MFC set to  0.000000
7/12/2012	2:24:27 PM	BCl3 MFC set to  0.000000
7/12/2012	2:24:27 PM	PH3 MFC set to  0.000000
7/12/2012	2:24:27 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:24:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:24:27 PM	Tube furnace set to 0
7/12/2012	2:24:28 PM	Run finished at 2:24 PM
7/12/2012	2:24:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	2:27:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	2:27:52 PM	Recipe started at 2:27 PM
7/12/2012	2:27:52 PM	Helium valve closed
7/12/2012	2:27:52 PM	H2 valve closed
7/12/2012	2:27:52 PM	BCl3 valve closed
7/12/2012	2:27:52 PM	PH3 valve closed
7/12/2012	2:27:52 PM	SiCl4 pre valve closed
7/12/2012	2:27:52 PM	SiCl4 post valve closed
7/12/2012	2:27:52 PM	Main Vac valve closed
7/12/2012	2:27:52 PM	Bubbler valve closed
7/12/2012	2:27:52 PM	Bypass valve opened
7/12/2012	2:27:52 PM	Helium MFC set to  0.000000
7/12/2012	2:27:52 PM	H2 MFC set to  0.000000
7/12/2012	2:27:52 PM	BCl3 MFC set to  0.000000
7/12/2012	2:27:52 PM	PH3 MFC set to  0.000000
7/12/2012	2:27:52 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:27:52 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:27:52 PM	Tube furnace set to 0
7/12/2012	2:29:01 PM	Helium valve closed
7/12/2012	2:29:01 PM	H2 valve closed
7/12/2012	2:29:01 PM	BCl3 valve closed
7/12/2012	2:29:01 PM	PH3 valve closed
7/12/2012	2:29:01 PM	SiCl4 pre valve closed
7/12/2012	2:29:01 PM	SiCl4 post valve closed
7/12/2012	2:29:01 PM	Main Vac valve closed
7/12/2012	2:29:01 PM	Bubbler valve closed
7/12/2012	2:29:01 PM	Bypass valve opened
7/12/2012	2:29:01 PM	Helium MFC set to  0.000000
7/12/2012	2:29:01 PM	H2 MFC set to  0.000000
7/12/2012	2:29:01 PM	BCl3 MFC set to  0.000000
7/12/2012	2:29:01 PM	PH3 MFC set to  0.000000
7/12/2012	2:29:01 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:29:01 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:29:01 PM	Tube furnace set to 0
7/12/2012	2:30:01 PM	Helium valve closed
7/12/2012	2:30:01 PM	H2 valve closed
7/12/2012	2:30:01 PM	BCl3 valve closed
7/12/2012	2:30:01 PM	PH3 valve closed
7/12/2012	2:30:01 PM	SiCl4 pre valve closed
7/12/2012	2:30:02 PM	SiCl4 post valve closed
7/12/2012	2:30:02 PM	Bypass valve closed
7/12/2012	2:30:02 PM	Bubbler valve closed
7/12/2012	2:30:02 PM	Main Vac valve opened
7/12/2012	2:30:02 PM	Helium MFC set to  0.000000
7/12/2012	2:30:02 PM	H2 MFC set to  0.000000
7/12/2012	2:30:02 PM	BCl3 MFC set to  0.000000
7/12/2012	2:30:02 PM	PH3 MFC set to  0.000000
7/12/2012	2:30:02 PM	SiCl4 MFC set to  0.000000
7/12/2012	2:30:02 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	2:30:02 PM	Tube furnace set to 0
7/12/2012	2:30:03 PM	Run finished at 2:30 PM
7/12/2012	2:30:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	3:58:27 PM	Main Vac valve closed
7/12/2012	3:58:43 PM	Main Vac valve opened
7/12/2012	4:00:05 PM	Recipe started at 4:00 PM
7/12/2012	4:00:05 PM	Helium valve closed
7/12/2012	4:00:05 PM	H2 valve closed
7/12/2012	4:00:05 PM	BCl3 valve closed
7/12/2012	4:00:05 PM	PH3 valve closed
7/12/2012	4:00:05 PM	SiCl4 pre valve closed
7/12/2012	4:00:05 PM	SiCl4 post valve closed
7/12/2012	4:00:05 PM	Bypass valve closed
7/12/2012	4:00:05 PM	Bubbler valve closed
7/12/2012	4:00:05 PM	Main Vac valve opened
7/12/2012	4:00:05 PM	Helium MFC set to  0.000000
7/12/2012	4:00:05 PM	H2 MFC set to  0.000000
7/12/2012	4:00:05 PM	BCl3 MFC set to  0.000000
7/12/2012	4:00:05 PM	PH3 MFC set to  0.000000
7/12/2012	4:00:05 PM	SiCl4 MFC set to  0.000000
7/12/2012	4:00:05 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:00:06 PM	Tube furnace set to 0
7/12/2012	4:00:09 PM	Helium valve closed
7/12/2012	4:00:09 PM	H2 valve closed
7/12/2012	4:00:09 PM	BCl3 valve closed
7/12/2012	4:00:09 PM	PH3 valve closed
7/12/2012	4:00:09 PM	SiCl4 pre valve closed
7/12/2012	4:00:09 PM	SiCl4 post valve closed
7/12/2012	4:00:09 PM	Main Vac valve closed
7/12/2012	4:00:09 PM	Bypass valve closed
7/12/2012	4:00:09 PM	Bubbler valve closed
7/12/2012	4:00:09 PM	Helium MFC set to  0.000000
7/12/2012	4:00:09 PM	H2 MFC set to  0.000000
7/12/2012	4:00:09 PM	BCl3 MFC set to  0.000000
7/12/2012	4:00:09 PM	PH3 MFC set to  0.000000
7/12/2012	4:00:09 PM	SiCl4 MFC set to  0.000000
7/12/2012	4:00:09 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:00:09 PM	Tube furnace set to 0
7/12/2012	4:00:12 PM	Helium valve closed
7/12/2012	4:00:12 PM	BCl3 valve closed
7/12/2012	4:00:12 PM	PH3 valve closed
7/12/2012	4:00:12 PM	SiCl4 pre valve closed
7/12/2012	4:00:12 PM	SiCl4 post valve closed
7/12/2012	4:00:12 PM	Main Vac valve closed
7/12/2012	4:00:12 PM	Bypass valve closed
7/12/2012	4:00:12 PM	Bubbler valve closed
7/12/2012	4:00:12 PM	H2 valve opened
7/12/2012	4:00:12 PM	Helium MFC set to  0.000000
7/12/2012	4:00:12 PM	H2 MFC set to  500.000000
7/12/2012	4:00:12 PM	BCl3 MFC set to  0.000000
7/12/2012	4:00:12 PM	PH3 MFC set to  0.000000
7/12/2012	4:00:12 PM	SiCl4 MFC set to  0.000000
7/12/2012	4:00:12 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:00:12 PM	Tube furnace set to 0
7/12/2012	4:01:25 PM	Helium valve closed
7/12/2012	4:01:25 PM	BCl3 valve closed
7/12/2012	4:01:25 PM	PH3 valve closed
7/12/2012	4:01:25 PM	SiCl4 pre valve closed
7/12/2012	4:01:25 PM	SiCl4 post valve closed
7/12/2012	4:01:25 PM	Main Vac valve closed
7/12/2012	4:01:25 PM	Bypass valve closed
7/12/2012	4:01:25 PM	H2 valve opened
7/12/2012	4:01:25 PM	Bubbler valve opened
7/12/2012	4:01:25 PM	Helium MFC set to  0.000000
7/12/2012	4:01:25 PM	H2 MFC set to  500.000000
7/12/2012	4:01:25 PM	BCl3 MFC set to  0.000000
7/12/2012	4:01:25 PM	PH3 MFC set to  0.000000
7/12/2012	4:01:25 PM	SiCl4 MFC set to  0.000000
7/12/2012	4:01:25 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:01:25 PM	Tube furnace set to 0
7/12/2012	4:01:26 PM	Helium valve closed
7/12/2012	4:01:26 PM	BCl3 valve closed
7/12/2012	4:01:26 PM	PH3 valve closed
7/12/2012	4:01:26 PM	SiCl4 pre valve closed
7/12/2012	4:01:26 PM	SiCl4 post valve closed
7/12/2012	4:01:26 PM	Main Vac valve closed
7/12/2012	4:01:26 PM	Bypass valve closed
7/12/2012	4:01:26 PM	H2 valve opened
7/12/2012	4:01:26 PM	Bubbler valve opened
7/12/2012	4:01:26 PM	Helium MFC set to  0.000000
7/12/2012	4:01:26 PM	H2 MFC set to  500.000000
7/12/2012	4:01:26 PM	BCl3 MFC set to  0.000000
7/12/2012	4:01:26 PM	PH3 MFC set to  0.000000
7/12/2012	4:01:26 PM	SiCl4 MFC set to  0.000000
7/12/2012	4:01:26 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:01:26 PM	Tube furnace set to 1000
7/12/2012	4:26:26 PM	Helium valve closed
7/12/2012	4:26:26 PM	PH3 valve closed
7/12/2012	4:26:26 PM	Main Vac valve closed
7/12/2012	4:26:26 PM	Bypass valve closed
7/12/2012	4:26:26 PM	H2 valve opened
7/12/2012	4:26:26 PM	BCl3 valve opened
7/12/2012	4:26:26 PM	SiCl4 pre valve opened
7/12/2012	4:26:26 PM	SiCl4 post valve opened
7/12/2012	4:26:26 PM	Bubbler valve opened
7/12/2012	4:26:26 PM	Helium MFC set to  0.000000
7/12/2012	4:26:26 PM	H2 MFC set to  440.000000
7/12/2012	4:26:26 PM	BCl3 MFC set to  10.000000
7/12/2012	4:26:26 PM	PH3 MFC set to  0.000000
7/12/2012	4:26:26 PM	SiCl4 MFC set to  50.000000
7/12/2012	4:26:26 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	4:26:27 PM	Tube furnace set to 1000
7/12/2012	5:00:26 PM	Helium valve closed
7/12/2012	5:00:26 PM	BCl3 valve closed
7/12/2012	5:00:26 PM	PH3 valve closed
7/12/2012	5:00:26 PM	SiCl4 pre valve closed
7/12/2012	5:00:26 PM	SiCl4 post valve closed
7/12/2012	5:00:27 PM	Main Vac valve closed
7/12/2012	5:00:27 PM	Bypass valve closed
7/12/2012	5:00:27 PM	H2 valve opened
7/12/2012	5:00:27 PM	Bubbler valve opened
7/12/2012	5:00:27 PM	Helium MFC set to  0.000000
7/12/2012	5:00:27 PM	H2 MFC set to  500.000000
7/12/2012	5:00:27 PM	BCl3 MFC set to  0.000000
7/12/2012	5:00:27 PM	PH3 MFC set to  0.000000
7/12/2012	5:00:27 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:00:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:00:27 PM	Tube furnace set to 750
7/12/2012	5:15:27 PM	H2 valve closed
7/12/2012	5:15:27 PM	BCl3 valve closed
7/12/2012	5:15:27 PM	PH3 valve closed
7/12/2012	5:15:27 PM	SiCl4 pre valve closed
7/12/2012	5:15:27 PM	SiCl4 post valve closed
7/12/2012	5:15:27 PM	Main Vac valve closed
7/12/2012	5:15:27 PM	Bypass valve closed
7/12/2012	5:15:27 PM	Helium valve opened
7/12/2012	5:15:27 PM	Bubbler valve opened
7/12/2012	5:15:27 PM	Helium MFC set to  500.000000
7/12/2012	5:15:27 PM	H2 MFC set to  0.000000
7/12/2012	5:15:27 PM	BCl3 MFC set to  0.000000
7/12/2012	5:15:27 PM	PH3 MFC set to  0.000000
7/12/2012	5:15:27 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:15:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:15:27 PM	Tube furnace set to 0
7/12/2012	5:35:27 PM	Helium valve closed
7/12/2012	5:35:27 PM	H2 valve closed
7/12/2012	5:35:27 PM	BCl3 valve closed
7/12/2012	5:35:27 PM	PH3 valve closed
7/12/2012	5:35:27 PM	SiCl4 pre valve closed
7/12/2012	5:35:27 PM	SiCl4 post valve closed
7/12/2012	5:35:27 PM	Main Vac valve closed
7/12/2012	5:35:27 PM	Bypass valve closed
7/12/2012	5:35:27 PM	Bubbler valve closed
7/12/2012	5:35:27 PM	Helium MFC set to  0.000000
7/12/2012	5:35:27 PM	H2 MFC set to  0.000000
7/12/2012	5:35:27 PM	BCl3 MFC set to  0.000000
7/12/2012	5:35:27 PM	PH3 MFC set to  0.000000
7/12/2012	5:35:27 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:35:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:35:27 PM	Tube furnace set to 0
7/12/2012	5:44:31 PM	Helium valve closed
7/12/2012	5:44:31 PM	H2 valve closed
7/12/2012	5:44:31 PM	BCl3 valve closed
7/12/2012	5:44:31 PM	PH3 valve closed
7/12/2012	5:44:31 PM	SiCl4 pre valve closed
7/12/2012	5:44:31 PM	SiCl4 post valve closed
7/12/2012	5:44:31 PM	Main Vac valve closed
7/12/2012	5:44:31 PM	Bubbler valve closed
7/12/2012	5:44:31 PM	Bypass valve opened
7/12/2012	5:44:31 PM	Helium MFC set to  0.000000
7/12/2012	5:44:31 PM	H2 MFC set to  0.000000
7/12/2012	5:44:31 PM	BCl3 MFC set to  0.000000
7/12/2012	5:44:31 PM	PH3 MFC set to  0.000000
7/12/2012	5:44:31 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:44:31 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:44:32 PM	Tube furnace set to 0
7/12/2012	5:45:22 PM	Helium valve closed
7/12/2012	5:45:22 PM	H2 valve closed
7/12/2012	5:45:22 PM	BCl3 valve closed
7/12/2012	5:45:22 PM	PH3 valve closed
7/12/2012	5:45:22 PM	SiCl4 pre valve closed
7/12/2012	5:45:22 PM	SiCl4 post valve closed
7/12/2012	5:45:22 PM	Main Vac valve closed
7/12/2012	5:45:22 PM	Bubbler valve closed
7/12/2012	5:45:22 PM	Bypass valve opened
7/12/2012	5:45:22 PM	Helium MFC set to  0.000000
7/12/2012	5:45:22 PM	H2 MFC set to  0.000000
7/12/2012	5:45:22 PM	BCl3 MFC set to  0.000000
7/12/2012	5:45:22 PM	PH3 MFC set to  0.000000
7/12/2012	5:45:22 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:45:22 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:45:23 PM	Tube furnace set to 0
7/12/2012	5:46:23 PM	Helium valve closed
7/12/2012	5:46:23 PM	H2 valve closed
7/12/2012	5:46:23 PM	BCl3 valve closed
7/12/2012	5:46:23 PM	PH3 valve closed
7/12/2012	5:46:23 PM	SiCl4 pre valve closed
7/12/2012	5:46:23 PM	SiCl4 post valve closed
7/12/2012	5:46:23 PM	Bypass valve closed
7/12/2012	5:46:23 PM	Bubbler valve closed
7/12/2012	5:46:23 PM	Main Vac valve opened
7/12/2012	5:46:23 PM	Helium MFC set to  0.000000
7/12/2012	5:46:23 PM	H2 MFC set to  0.000000
7/12/2012	5:46:23 PM	BCl3 MFC set to  0.000000
7/12/2012	5:46:23 PM	PH3 MFC set to  0.000000
7/12/2012	5:46:23 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:46:23 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:46:23 PM	Tube furnace set to 0
7/12/2012	5:46:28 PM	Run finished at 5:46 PM
7/12/2012	5:53:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	5:53:43 PM	Recipe started at 5:53 PM
7/12/2012	5:53:43 PM	Helium valve closed
7/12/2012	5:53:43 PM	H2 valve closed
7/12/2012	5:53:43 PM	BCl3 valve closed
7/12/2012	5:53:43 PM	PH3 valve closed
7/12/2012	5:53:43 PM	SiCl4 pre valve closed
7/12/2012	5:53:43 PM	SiCl4 post valve closed
7/12/2012	5:53:43 PM	Main Vac valve closed
7/12/2012	5:53:43 PM	Bypass valve closed
7/12/2012	5:53:43 PM	Bubbler valve closed
7/12/2012	5:53:43 PM	Helium MFC set to  0.000000
7/12/2012	5:53:43 PM	H2 MFC set to  0.000000
7/12/2012	5:53:43 PM	BCl3 MFC set to  0.000000
7/12/2012	5:53:43 PM	PH3 MFC set to  0.000000
7/12/2012	5:53:43 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:53:43 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:53:43 PM	Tube furnace set to 0
7/12/2012	5:53:46 PM	H2 valve closed
7/12/2012	5:53:46 PM	BCl3 valve closed
7/12/2012	5:53:46 PM	PH3 valve closed
7/12/2012	5:53:46 PM	SiCl4 pre valve closed
7/12/2012	5:53:46 PM	SiCl4 post valve closed
7/12/2012	5:53:46 PM	Main Vac valve closed
7/12/2012	5:53:46 PM	Bypass valve closed
7/12/2012	5:53:46 PM	Bubbler valve closed
7/12/2012	5:53:46 PM	Helium valve opened
7/12/2012	5:53:46 PM	Helium MFC set to  500.000000
7/12/2012	5:53:46 PM	H2 MFC set to  0.000000
7/12/2012	5:53:46 PM	BCl3 MFC set to  0.000000
7/12/2012	5:53:46 PM	PH3 MFC set to  0.000000
7/12/2012	5:53:46 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:53:46 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:53:46 PM	Tube furnace set to 0
7/12/2012	5:54:55 PM	Helium valve closed
7/12/2012	5:54:55 PM	H2 valve closed
7/12/2012	5:54:55 PM	BCl3 valve closed
7/12/2012	5:54:55 PM	PH3 valve closed
7/12/2012	5:54:55 PM	SiCl4 pre valve closed
7/12/2012	5:54:55 PM	SiCl4 post valve closed
7/12/2012	5:54:55 PM	Main Vac valve closed
7/12/2012	5:54:55 PM	Bypass valve closed
7/12/2012	5:54:55 PM	Bubbler valve closed
7/12/2012	5:54:55 PM	Helium MFC set to  0.000000
7/12/2012	5:54:55 PM	H2 MFC set to  0.000000
7/12/2012	5:54:55 PM	BCl3 MFC set to  0.000000
7/12/2012	5:54:55 PM	PH3 MFC set to  0.000000
7/12/2012	5:54:55 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:54:55 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:54:56 PM	Tube furnace set to 0
7/12/2012	5:54:57 PM	Run finished at 5:54 PM
7/12/2012	5:54:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	5:58:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	5:58:27 PM	Recipe started at 5:58 PM
7/12/2012	5:58:27 PM	Helium valve closed
7/12/2012	5:58:27 PM	H2 valve closed
7/12/2012	5:58:27 PM	BCl3 valve closed
7/12/2012	5:58:27 PM	PH3 valve closed
7/12/2012	5:58:27 PM	SiCl4 pre valve closed
7/12/2012	5:58:27 PM	SiCl4 post valve closed
7/12/2012	5:58:27 PM	Main Vac valve closed
7/12/2012	5:58:27 PM	Bubbler valve closed
7/12/2012	5:58:27 PM	Bypass valve opened
7/12/2012	5:58:27 PM	Helium MFC set to  0.000000
7/12/2012	5:58:27 PM	H2 MFC set to  0.000000
7/12/2012	5:58:27 PM	BCl3 MFC set to  0.000000
7/12/2012	5:58:27 PM	PH3 MFC set to  0.000000
7/12/2012	5:58:27 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:58:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:58:28 PM	Tube furnace set to 0
7/12/2012	5:59:37 PM	Helium valve closed
7/12/2012	5:59:37 PM	H2 valve closed
7/12/2012	5:59:37 PM	BCl3 valve closed
7/12/2012	5:59:37 PM	PH3 valve closed
7/12/2012	5:59:37 PM	SiCl4 pre valve closed
7/12/2012	5:59:37 PM	SiCl4 post valve closed
7/12/2012	5:59:37 PM	Main Vac valve closed
7/12/2012	5:59:37 PM	Bubbler valve closed
7/12/2012	5:59:37 PM	Bypass valve opened
7/12/2012	5:59:37 PM	Helium MFC set to  0.000000
7/12/2012	5:59:37 PM	H2 MFC set to  0.000000
7/12/2012	5:59:37 PM	BCl3 MFC set to  0.000000
7/12/2012	5:59:37 PM	PH3 MFC set to  0.000000
7/12/2012	5:59:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	5:59:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	5:59:37 PM	Tube furnace set to 0
7/12/2012	6:00:37 PM	Helium valve closed
7/12/2012	6:00:37 PM	H2 valve closed
7/12/2012	6:00:37 PM	BCl3 valve closed
7/12/2012	6:00:37 PM	PH3 valve closed
7/12/2012	6:00:37 PM	SiCl4 pre valve closed
7/12/2012	6:00:37 PM	SiCl4 post valve closed
7/12/2012	6:00:37 PM	Bypass valve closed
7/12/2012	6:00:37 PM	Bubbler valve closed
7/12/2012	6:00:37 PM	Main Vac valve opened
7/12/2012	6:00:37 PM	Helium MFC set to  0.000000
7/12/2012	6:00:37 PM	H2 MFC set to  0.000000
7/12/2012	6:00:37 PM	BCl3 MFC set to  0.000000
7/12/2012	6:00:37 PM	PH3 MFC set to  0.000000
7/12/2012	6:00:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	6:00:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	6:00:37 PM	Tube furnace set to 0
7/12/2012	6:00:38 PM	Run finished at 6:00 PM
7/12/2012	6:00:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	6:01:18 PM	Recipe started at 6:01 PM
7/12/2012	6:01:18 PM	Helium valve closed
7/12/2012	6:01:18 PM	H2 valve closed
7/12/2012	6:01:18 PM	BCl3 valve closed
7/12/2012	6:01:18 PM	PH3 valve closed
7/12/2012	6:01:18 PM	SiCl4 pre valve closed
7/12/2012	6:01:18 PM	SiCl4 post valve closed
7/12/2012	6:01:18 PM	Bypass valve closed
7/12/2012	6:01:18 PM	Bubbler valve closed
7/12/2012	6:01:18 PM	Main Vac valve opened
7/12/2012	6:01:18 PM	Helium MFC set to  0.000000
7/12/2012	6:01:18 PM	H2 MFC set to  0.000000
7/12/2012	6:01:18 PM	BCl3 MFC set to  0.000000
7/12/2012	6:01:18 PM	PH3 MFC set to  0.000000
7/12/2012	6:01:19 PM	SiCl4 MFC set to  0.000000
7/12/2012	6:01:19 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	6:01:19 PM	Tube furnace set to 0
7/12/2012	7:31:19 PM	Helium valve closed
7/12/2012	7:31:19 PM	H2 valve closed
7/12/2012	7:31:19 PM	BCl3 valve closed
7/12/2012	7:31:19 PM	PH3 valve closed
7/12/2012	7:31:19 PM	SiCl4 pre valve closed
7/12/2012	7:31:19 PM	SiCl4 post valve closed
7/12/2012	7:31:19 PM	Main Vac valve closed
7/12/2012	7:31:19 PM	Bypass valve closed
7/12/2012	7:31:19 PM	Bubbler valve closed
7/12/2012	7:31:19 PM	Helium MFC set to  0.000000
7/12/2012	7:31:19 PM	H2 MFC set to  0.000000
7/12/2012	7:31:19 PM	BCl3 MFC set to  0.000000
7/12/2012	7:31:19 PM	PH3 MFC set to  0.000000
7/12/2012	7:31:19 PM	SiCl4 MFC set to  0.000000
7/12/2012	7:31:19 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:31:19 PM	Tube furnace set to 0
7/12/2012	7:31:22 PM	Helium valve closed
7/12/2012	7:31:22 PM	BCl3 valve closed
7/12/2012	7:31:22 PM	PH3 valve closed
7/12/2012	7:31:22 PM	SiCl4 pre valve closed
7/12/2012	7:31:22 PM	SiCl4 post valve closed
7/12/2012	7:31:22 PM	Main Vac valve closed
7/12/2012	7:31:22 PM	Bypass valve closed
7/12/2012	7:31:22 PM	Bubbler valve closed
7/12/2012	7:31:22 PM	H2 valve opened
7/12/2012	7:31:22 PM	Helium MFC set to  0.000000
7/12/2012	7:31:22 PM	H2 MFC set to  500.000000
7/12/2012	7:31:22 PM	BCl3 MFC set to  0.000000
7/12/2012	7:31:22 PM	PH3 MFC set to  0.000000
7/12/2012	7:31:22 PM	SiCl4 MFC set to  0.000000
7/12/2012	7:31:22 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:31:22 PM	Tube furnace set to 0
7/12/2012	7:32:35 PM	Helium valve closed
7/12/2012	7:32:35 PM	BCl3 valve closed
7/12/2012	7:32:35 PM	PH3 valve closed
7/12/2012	7:32:35 PM	SiCl4 pre valve closed
7/12/2012	7:32:35 PM	SiCl4 post valve closed
7/12/2012	7:32:35 PM	Main Vac valve closed
7/12/2012	7:32:35 PM	Bypass valve closed
7/12/2012	7:32:35 PM	H2 valve opened
7/12/2012	7:32:35 PM	Bubbler valve opened
7/12/2012	7:32:35 PM	Helium MFC set to  0.000000
7/12/2012	7:32:35 PM	H2 MFC set to  500.000000
7/12/2012	7:32:35 PM	BCl3 MFC set to  0.000000
7/12/2012	7:32:35 PM	PH3 MFC set to  0.000000
7/12/2012	7:32:35 PM	SiCl4 MFC set to  0.000000
7/12/2012	7:32:35 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:32:35 PM	Tube furnace set to 0
7/12/2012	7:32:36 PM	Helium valve closed
7/12/2012	7:32:36 PM	BCl3 valve closed
7/12/2012	7:32:36 PM	PH3 valve closed
7/12/2012	7:32:36 PM	SiCl4 pre valve closed
7/12/2012	7:32:36 PM	SiCl4 post valve closed
7/12/2012	7:32:36 PM	Main Vac valve closed
7/12/2012	7:32:36 PM	Bypass valve closed
7/12/2012	7:32:36 PM	H2 valve opened
7/12/2012	7:32:36 PM	Bubbler valve opened
7/12/2012	7:32:36 PM	Helium MFC set to  0.000000
7/12/2012	7:32:36 PM	H2 MFC set to  500.000000
7/12/2012	7:32:36 PM	BCl3 MFC set to  0.000000
7/12/2012	7:32:36 PM	PH3 MFC set to  0.000000
7/12/2012	7:32:36 PM	SiCl4 MFC set to  0.000000
7/12/2012	7:32:36 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:32:36 PM	Tube furnace set to 1000
7/12/2012	7:57:36 PM	Helium valve closed
7/12/2012	7:57:36 PM	PH3 valve closed
7/12/2012	7:57:36 PM	Main Vac valve closed
7/12/2012	7:57:36 PM	Bypass valve closed
7/12/2012	7:57:36 PM	H2 valve opened
7/12/2012	7:57:36 PM	BCl3 valve opened
7/12/2012	7:57:36 PM	SiCl4 pre valve opened
7/12/2012	7:57:36 PM	SiCl4 post valve opened
7/12/2012	7:57:36 PM	Bubbler valve opened
7/12/2012	7:57:36 PM	Helium MFC set to  0.000000
7/12/2012	7:57:36 PM	H2 MFC set to  450.000000
7/12/2012	7:57:36 PM	BCl3 MFC set to  1.000000
7/12/2012	7:57:36 PM	PH3 MFC set to  0.000000
7/12/2012	7:57:36 PM	SiCl4 MFC set to  50.000000
7/12/2012	7:57:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	7:57:37 PM	Tube furnace set to 1000
7/12/2012	8:31:37 PM	Helium valve closed
7/12/2012	8:31:37 PM	BCl3 valve closed
7/12/2012	8:31:37 PM	PH3 valve closed
7/12/2012	8:31:37 PM	SiCl4 pre valve closed
7/12/2012	8:31:37 PM	SiCl4 post valve closed
7/12/2012	8:31:37 PM	Main Vac valve closed
7/12/2012	8:31:37 PM	Bypass valve closed
7/12/2012	8:31:37 PM	H2 valve opened
7/12/2012	8:31:37 PM	Bubbler valve opened
7/12/2012	8:31:37 PM	Helium MFC set to  0.000000
7/12/2012	8:31:37 PM	H2 MFC set to  500.000000
7/12/2012	8:31:37 PM	BCl3 MFC set to  0.000000
7/12/2012	8:31:37 PM	PH3 MFC set to  0.000000
7/12/2012	8:31:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	8:31:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	8:31:37 PM	Tube furnace set to 750
7/12/2012	8:46:37 PM	H2 valve closed
7/12/2012	8:46:37 PM	BCl3 valve closed
7/12/2012	8:46:37 PM	PH3 valve closed
7/12/2012	8:46:37 PM	SiCl4 pre valve closed
7/12/2012	8:46:37 PM	SiCl4 post valve closed
7/12/2012	8:46:37 PM	Main Vac valve closed
7/12/2012	8:46:37 PM	Bypass valve closed
7/12/2012	8:46:37 PM	Helium valve opened
7/12/2012	8:46:37 PM	Bubbler valve opened
7/12/2012	8:46:37 PM	Helium MFC set to  500.000000
7/12/2012	8:46:37 PM	H2 MFC set to  0.000000
7/12/2012	8:46:37 PM	BCl3 MFC set to  0.000000
7/12/2012	8:46:37 PM	PH3 MFC set to  0.000000
7/12/2012	8:46:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	8:46:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	8:46:37 PM	Tube furnace set to 0
7/12/2012	9:06:37 PM	Helium valve closed
7/12/2012	9:06:37 PM	H2 valve closed
7/12/2012	9:06:37 PM	BCl3 valve closed
7/12/2012	9:06:37 PM	PH3 valve closed
7/12/2012	9:06:37 PM	SiCl4 pre valve closed
7/12/2012	9:06:37 PM	SiCl4 post valve closed
7/12/2012	9:06:37 PM	Main Vac valve closed
7/12/2012	9:06:37 PM	Bypass valve closed
7/12/2012	9:06:37 PM	Bubbler valve closed
7/12/2012	9:06:37 PM	Helium MFC set to  0.000000
7/12/2012	9:06:37 PM	H2 MFC set to  0.000000
7/12/2012	9:06:37 PM	BCl3 MFC set to  0.000000
7/12/2012	9:06:37 PM	PH3 MFC set to  0.000000
7/12/2012	9:06:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	9:06:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:06:37 PM	Tube furnace set to 0
7/12/2012	9:26:37 PM	Helium valve closed
7/12/2012	9:26:37 PM	H2 valve closed
7/12/2012	9:26:37 PM	BCl3 valve closed
7/12/2012	9:26:37 PM	PH3 valve closed
7/12/2012	9:26:37 PM	SiCl4 pre valve closed
7/12/2012	9:26:37 PM	SiCl4 post valve closed
7/12/2012	9:26:37 PM	Main Vac valve closed
7/12/2012	9:26:37 PM	Bubbler valve closed
7/12/2012	9:26:37 PM	Bypass valve opened
7/12/2012	9:26:37 PM	Helium MFC set to  0.000000
7/12/2012	9:26:37 PM	H2 MFC set to  0.000000
7/12/2012	9:26:37 PM	BCl3 MFC set to  0.000000
7/12/2012	9:26:37 PM	PH3 MFC set to  0.000000
7/12/2012	9:26:37 PM	SiCl4 MFC set to  0.000000
7/12/2012	9:26:37 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:26:37 PM	Tube furnace set to 0
7/12/2012	9:27:28 PM	Helium valve closed
7/12/2012	9:27:28 PM	H2 valve closed
7/12/2012	9:27:28 PM	BCl3 valve closed
7/12/2012	9:27:28 PM	PH3 valve closed
7/12/2012	9:27:28 PM	SiCl4 pre valve closed
7/12/2012	9:27:28 PM	SiCl4 post valve closed
7/12/2012	9:27:28 PM	Main Vac valve closed
7/12/2012	9:27:28 PM	Bubbler valve closed
7/12/2012	9:27:28 PM	Bypass valve opened
7/12/2012	9:27:28 PM	Helium MFC set to  0.000000
7/12/2012	9:27:28 PM	H2 MFC set to  0.000000
7/12/2012	9:27:28 PM	BCl3 MFC set to  0.000000
7/12/2012	9:27:28 PM	PH3 MFC set to  0.000000
7/12/2012	9:27:28 PM	SiCl4 MFC set to  0.000000
7/12/2012	9:27:28 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:27:28 PM	Tube furnace set to 0
7/12/2012	9:28:28 PM	Helium valve closed
7/12/2012	9:28:28 PM	H2 valve closed
7/12/2012	9:28:28 PM	BCl3 valve closed
7/12/2012	9:28:28 PM	PH3 valve closed
7/12/2012	9:28:28 PM	SiCl4 pre valve closed
7/12/2012	9:28:28 PM	SiCl4 post valve closed
7/12/2012	9:28:28 PM	Bypass valve closed
7/12/2012	9:28:28 PM	Bubbler valve closed
7/12/2012	9:28:28 PM	Main Vac valve opened
7/12/2012	9:28:28 PM	Helium MFC set to  0.000000
7/12/2012	9:28:28 PM	H2 MFC set to  0.000000
7/12/2012	9:28:28 PM	BCl3 MFC set to  0.000000
7/12/2012	9:28:28 PM	PH3 MFC set to  0.000000
7/12/2012	9:28:28 PM	SiCl4 MFC set to  0.000000
7/12/2012	9:28:28 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	9:28:28 PM	Tube furnace set to 0
7/12/2012	10:28:28 PM	Run finished at 10:28 PM
7/12/2012	11:02:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	11:02:03 PM	Recipe started at 11:02 PM
7/12/2012	11:02:03 PM	Helium valve closed
7/12/2012	11:02:03 PM	H2 valve closed
7/12/2012	11:02:03 PM	BCl3 valve closed
7/12/2012	11:02:03 PM	PH3 valve closed
7/12/2012	11:02:03 PM	SiCl4 pre valve closed
7/12/2012	11:02:03 PM	SiCl4 post valve closed
7/12/2012	11:02:03 PM	Main Vac valve closed
7/12/2012	11:02:03 PM	Bypass valve closed
7/12/2012	11:02:03 PM	Bubbler valve closed
7/12/2012	11:02:03 PM	Helium MFC set to  0.000000
7/12/2012	11:02:03 PM	H2 MFC set to  0.000000
7/12/2012	11:02:03 PM	BCl3 MFC set to  0.000000
7/12/2012	11:02:03 PM	PH3 MFC set to  0.000000
7/12/2012	11:02:03 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:02:03 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:02:03 PM	Tube furnace set to 0
7/12/2012	11:02:06 PM	H2 valve closed
7/12/2012	11:02:06 PM	BCl3 valve closed
7/12/2012	11:02:06 PM	PH3 valve closed
7/12/2012	11:02:06 PM	SiCl4 pre valve closed
7/12/2012	11:02:06 PM	SiCl4 post valve closed
7/12/2012	11:02:06 PM	Main Vac valve closed
7/12/2012	11:02:06 PM	Bypass valve closed
7/12/2012	11:02:06 PM	Bubbler valve closed
7/12/2012	11:02:06 PM	Helium valve opened
7/12/2012	11:02:06 PM	Helium MFC set to  500.000000
7/12/2012	11:02:06 PM	H2 MFC set to  0.000000
7/12/2012	11:02:06 PM	BCl3 MFC set to  0.000000
7/12/2012	11:02:06 PM	PH3 MFC set to  0.000000
7/12/2012	11:02:06 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:02:06 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:02:06 PM	Tube furnace set to 0
7/12/2012	11:03:15 PM	Helium valve closed
7/12/2012	11:03:15 PM	H2 valve closed
7/12/2012	11:03:15 PM	BCl3 valve closed
7/12/2012	11:03:15 PM	PH3 valve closed
7/12/2012	11:03:15 PM	SiCl4 pre valve closed
7/12/2012	11:03:15 PM	SiCl4 post valve closed
7/12/2012	11:03:15 PM	Main Vac valve closed
7/12/2012	11:03:15 PM	Bypass valve closed
7/12/2012	11:03:15 PM	Bubbler valve closed
7/12/2012	11:03:15 PM	Helium MFC set to  0.000000
7/12/2012	11:03:15 PM	H2 MFC set to  0.000000
7/12/2012	11:03:15 PM	BCl3 MFC set to  0.000000
7/12/2012	11:03:15 PM	PH3 MFC set to  0.000000
7/12/2012	11:03:15 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:03:15 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:03:16 PM	Tube furnace set to 0
7/12/2012	11:03:17 PM	Run finished at 11:03 PM
7/12/2012	11:03:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2012	11:09:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	11:09:08 PM	Recipe started at 11:09 PM
7/12/2012	11:09:08 PM	Helium valve closed
7/12/2012	11:09:08 PM	H2 valve closed
7/12/2012	11:09:08 PM	BCl3 valve closed
7/12/2012	11:09:08 PM	PH3 valve closed
7/12/2012	11:09:08 PM	SiCl4 pre valve closed
7/12/2012	11:09:08 PM	SiCl4 post valve closed
7/12/2012	11:09:08 PM	Main Vac valve closed
7/12/2012	11:09:08 PM	Bubbler valve closed
7/12/2012	11:09:08 PM	Bypass valve opened
7/12/2012	11:09:08 PM	Helium MFC set to  0.000000
7/12/2012	11:09:08 PM	H2 MFC set to  0.000000
7/12/2012	11:09:08 PM	BCl3 MFC set to  0.000000
7/12/2012	11:09:08 PM	PH3 MFC set to  0.000000
7/12/2012	11:09:08 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:09:08 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:09:08 PM	Tube furnace set to 0
7/12/2012	11:10:18 PM	Helium valve closed
7/12/2012	11:10:18 PM	H2 valve closed
7/12/2012	11:10:18 PM	BCl3 valve closed
7/12/2012	11:10:18 PM	PH3 valve closed
7/12/2012	11:10:18 PM	SiCl4 pre valve closed
7/12/2012	11:10:18 PM	SiCl4 post valve closed
7/12/2012	11:10:18 PM	Main Vac valve closed
7/12/2012	11:10:18 PM	Bubbler valve closed
7/12/2012	11:10:18 PM	Bypass valve opened
7/12/2012	11:10:18 PM	Helium MFC set to  0.000000
7/12/2012	11:10:18 PM	H2 MFC set to  0.000000
7/12/2012	11:10:18 PM	BCl3 MFC set to  0.000000
7/12/2012	11:10:18 PM	PH3 MFC set to  0.000000
7/12/2012	11:10:18 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:10:18 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:10:18 PM	Tube furnace set to 0
7/12/2012	11:11:18 PM	Helium valve closed
7/12/2012	11:11:18 PM	H2 valve closed
7/12/2012	11:11:18 PM	BCl3 valve closed
7/12/2012	11:11:18 PM	PH3 valve closed
7/12/2012	11:11:18 PM	SiCl4 pre valve closed
7/12/2012	11:11:18 PM	SiCl4 post valve closed
7/12/2012	11:11:18 PM	Bypass valve closed
7/12/2012	11:11:18 PM	Bubbler valve closed
7/12/2012	11:11:18 PM	Main Vac valve opened
7/12/2012	11:11:18 PM	Helium MFC set to  0.000000
7/12/2012	11:11:18 PM	H2 MFC set to  0.000000
7/12/2012	11:11:18 PM	BCl3 MFC set to  0.000000
7/12/2012	11:11:18 PM	PH3 MFC set to  0.000000
7/12/2012	11:11:18 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:11:18 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:11:18 PM	Tube furnace set to 0
7/12/2012	11:11:19 PM	Run finished at 11:11 PM
7/12/2012	11:11:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2012	11:11:28 PM	Recipe started at 11:11 PM
7/12/2012	11:11:28 PM	Helium valve closed
7/12/2012	11:11:28 PM	H2 valve closed
7/12/2012	11:11:28 PM	BCl3 valve closed
7/12/2012	11:11:28 PM	PH3 valve closed
7/12/2012	11:11:28 PM	SiCl4 pre valve closed
7/12/2012	11:11:28 PM	SiCl4 post valve closed
7/12/2012	11:11:28 PM	Bypass valve closed
7/12/2012	11:11:28 PM	Bubbler valve closed
7/12/2012	11:11:28 PM	Main Vac valve opened
7/12/2012	11:11:28 PM	Helium MFC set to  0.000000
7/12/2012	11:11:28 PM	H2 MFC set to  0.000000
7/12/2012	11:11:28 PM	BCl3 MFC set to  0.000000
7/12/2012	11:11:28 PM	PH3 MFC set to  0.000000
7/12/2012	11:11:28 PM	SiCl4 MFC set to  0.000000
7/12/2012	11:11:28 PM	Bypass solenoid MFC set to  0.000000
7/12/2012	11:11:28 PM	Tube furnace set to 0
